Overview
The Nanofabrication Technologies course offered by KTH Royal Institute of Technology will cover state-of-the-art high volume techiniques as well as technologies used in R&D.
The course gives the student basic understanding of the sustainability aspects in integrated circuit fabrication. In the lab, students will build functional CMOS circuits from scratch using SOI wafers as starting material.
Outcomes
After the course, the student should be able to:
- discuss and review unit manufacturing processes for micro- and nanofabrication on wafers
- discuss and review Moore's law and advanced process technologies
- discuss and review examples of process integration
- use models and calculate relevant characteristics and conditions in process technology
- fabricate devices in a clean room.
Programme Structure
The program focuses on:
- The course covers process technologies that are used in micro- and nanofabrication of devices and systems on wafers.
- Applications include all technologies that are based on wafer scale fabrication such as integrated circuits, micro-electro-mechanical systems and optical devices.
- The basic unit processes deposition, patterning, etching, doping and heat treatment are covered, followed by process integration to build complex devices including statistical process control and yield models.
- Moore's law and the basic economics for integrated circuits are covered and examplified by reviewing the state-of-the art process technology nodes.
- Hands-on experience of fabricating devices in a clean room (Electrum Laboratory) and use a number of unit processes included in the course.
Key information
Duration
- Full-time
- 3 months
Start dates & application deadlines
- StartingApplication deadline not specified.
Language
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Credits
Delivered
Campus Location
- Stockholm, Sweden
Disciplines
Electrical Engineering Nanoscience and Nanotechnology View 9 other Short Courses in Electrical Engineering in SwedenWhat students do after studying
Academic requirements
We are not aware of any specific GRE, GMAT or GPA grading score requirements for this programme.
English requirements
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Other requirements
General requirements
- Knowledge in calculus in one variable, 7,5 credits, corresponding to completed course SF1625/SF1673/SF1685.
- Knowledge in classical physics, 7,5 credits, corresponding to completed course SK1108/SK1118.
- Documented knowledge in English corresponding to the upper secondary course English B/English 6.
- Courses on BSc level or higher in solid-state physics and semiconductor devices.
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Tuition Fees
Living costs
Stockholm
The living costs include the total expenses per month, covering accommodation, public transportation, utilities (electricity, internet), books and groceries.